The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1998
Filed:
Jul. 01, 1996
Satoru Kaneko, Kumagaya, JP;
Toshiyuki Ohkoda, Ohra-gun, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Abstract
A method of manufacturing a semiconductor integrated circuit device employs a new reflowing process of an insulating film having contact holes and openings therethrough. A good step coverage of a wiring electrode at the contact holes of the insulating film can be obtained with reduced thermal cycles in the manufacturing of integrated circuit devices, and also with a reduced heat treatment temperature of the reflowing process. The process includes a step of depositing a silicon nitride film on the insulating film and on the contact holes by chemical vapor deposition at a temperature between 700.degree. C. and 800.degree. C. so as to deform edges of the contact holes in the insulating film to be rounded and smooth.