The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 1998

Filed:

Jan. 22, 1996
Applicant:
Inventor:

Gary B Tepolt, North Pelham, NH (US);

Assignee:

Integrated Solutions, Inc., Tewksbury, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J / ;
U.S. Cl.
CPC ...
4147445 ; 414935 ; 901 15 ; 901 21 ; 7449004 ;
Abstract

A robotic wafer handler has first and second arms pivotally connected at a swing point to operate in a plane. Each arm is independently drivable through greater than 360.degree. of rotation in the plane. The wafer handler may also include mechanisms for adjusting the plane of rotation, i.e., for providing lift and tilt.


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