The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 1998
Filed:
Aug. 02, 1996
Applicant:
Inventors:
Martin Schmidt, Berlin, DE;
Thomas Zetterer, Engelstadt, DE;
Assignee:
Institut fur Mikrotechnik Mainz GmbH, Mainz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
378161 ;
Abstract
An X-ray radiolucent material consisting of a beryllium substrate and a protective coating connected to the substrate is produced by applying a protective coating comprised of at least one component selected from the group consisting of silicon oxide, silicon nitride, silicon carbide, and amorphous carbon. Preferably, a CVD process or sputtering is used to apply the protective coating.