The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1998
Filed:
Jun. 07, 1996
Nicholas F Pasch, Pacifica, CA (US);
Ana Ley, Sunnyvale, CA (US);
LSI Logic Corporation, Milpitas, CA (US);
Abstract
According to the present invention, there is provided a method for fabricating a field effect transistor having reduced hot electron effects. In one embodiment, the method comprises the steps of disposing a gate oxide layer on a semiconductor substrate; disposing a gate material on the gate oxide layer; masking a portion of the gate material; anisotropically etching a gate structure into the gate material such that a trench is formed in the semiconductor substrate; implanting a source structure in the semiconductor substrate, the source structure having a first doping region superjacent a second doping region, the second doping region being lightly doped relative to the first doping region.