The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1998
Filed:
Oct. 15, 1996
Applicant:
Inventor:
Deepak K Pai, Burnsville, MN (US);
Assignee:
Ceridian Corporation, Minneapolis, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356375 ; 356371 ; 356237 ; 356376 ;
Abstract
A process of measuring coplanarity of an array of conductive elements on a circuit device is disclosed. Light is impinged from a reference plane onto an element of the array at a predetermined angle of incidence. Light is also impinged from the reference plane onto a reflective feature on a measurement plane determined by three points of the circuit device having highest elevations from a base of the circuit device, at the same predetermined angle of incidence. A response of the light impinged onto the element of the array and the reflective feature on the measurement plane is measured to determine coplanarity of the array.