The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1998
Filed:
Oct. 23, 1995
Toru Kawase, Katano, JP;
Yoshinobu Nagano, Kyoto, JP;
Tadashi Kimura, Kyoto, JP;
Yoshikazu Yoshida, Kofu, JP;
Shinichi Mizuguchi, Katano, JP;
Matsushita Electric Industrial Co., Ltd., Kadoma, JP;
Abstract
The microwave plasma torch of the invention includes: a vacuum container having an evacuating apparatus; a coaxial waveguide including an inner conductor and an outer conductor, a first end portion of the coaxial waveguide being connected with a microwave supplying apparatus for supplying a microwave and a second end portion of the coaxial waveguide being connected with the vacuum container, thereby introducing the microwave supplied from the microwave supplying apparatus into the vacuum container along a waveguide axis of the coaxial waveguide; and a gas supplying apparatus for injecting a gas into the vacuum container along a plurality of injection axes. In the microwave plasma torch, at least two of the plurality of injection axes do not cross the waveguide axis in the second end portion, and do not exist in a plane vertical to the waveguide axis, and a ratio of a diameter of the inner conductor to a diameter of the outer conductor in a vicinity of the second end portion decreases from the first to the second end portion along the waveguide axis.