The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1998
Filed:
Aug. 17, 1995
Applicant:
Inventors:
Armin Conrad, Herborn Horbach, DE;
Otto Ganschow, Hurth, DE;
Assignee:
Balzers-Pfeiffer GmbH, Asslar, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B / ;
U.S. Cl.
CPC ...
417 441 ; 417202 ; 417250 ; 4174234 ; 4174255 ;
Abstract
A vacuum pump system for multi-stage gas inlet systems and including a pumping unit formed of a turbomolecular pump and one or several further pumps arranged downstream of the turbomolecular pump and the rotors of which are located on the same shaft as the rotor of the turbomolecular pump, and an additional intermittently operated dry running pump, which discharges against atmospheric pressure.