The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1998
Filed:
Jan. 17, 1997
Applicant:
Inventors:
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B / ; H01L / ;
U.S. Cl.
CPC ...
396 50 ; 396 53 ; 310338 ;
Abstract
A detecting apparatus which includes a balancer which generates a moment of rotation around an axis; and a pressure sensing sheet which contacts at one or more contact points with the balancer and outputs a pressure signal corresponding to a force acting on the contact point and depends on the moment of rotation. An attitude detecting apparatus and a detecting apparatus for difference of attitude each of which includes, the detecting apparatus; and an arithmetic circuit which receives a pressure signal at predefined time intervals in order and processes a calculation.