The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1998
Filed:
Aug. 12, 1996
Michael DiBattista, Ann Arbor, MI (US);
Sanjay V Patel, Ann Arbor, MI (US);
John L Gland, Pickney, MI (US);
Johannes W Schwank, Ann Arbor, MI (US);
The Regents Of The University Of Michigan, Ann Arbor, MI (US);
Abstract
A hot stage for a scanning probe microscope includes a substrate having a dielectric window region which is stress compensated to be held in mild tension at elevated temperatures. A heating element is supplied to heat a specimen deposited on the dielectric widow region and the scanning probe microscope is used to observe specimen characteristics at the elevated temperatures. The dielectric window region is configured to be thermally isolated from the rest of the hot stage allowing only a minimum amount of heat to be dissipated into the scanning probe microscope. Temperature sensing resistors are included for monitoring the temperature in the dielectric window region. Conductivity cell electrodes can also be included for sensing the conductivity and capacitance of the specimen. Furthermore, additional control and measurement hardware, such as a temperature sensor circuit, evaluation station, the ramp generator circuit, etc. can be included to provide additional system features.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile