The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1998
Filed:
Feb. 14, 1996
Applicant:
Inventor:
Nobuya Seko, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
445-3 ; 445 63 ;
Abstract
An inspection apparatus including an XY movable table onto which an inspection object wafer is placed in position and a prober for detecting electrons emitted from a field-emission cold cathode of the wafer is provided in a vacuum chamber. A characteristic of the field-emission cold cathode is inspected before it is mounted onto a device.