The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 1998
Filed:
May. 30, 1995
Applicant:
Inventors:
Masashi Tanaka, Yokohama, JP;
Masato Kumazawa, Kawasaki, JP;
Kinya Kato, Yokohama, JP;
Masaki Kato, Yokohama, JP;
Hiroshi Chiba, Yokohama, JP;
Hiroshi Shirasu, Yokohama, JP;
Assignee:
Nikon Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; G03F / ; G03F / ;
U.S. Cl.
CPC ...
355 53 ; 355 55 ; 355 67 ; 356399 ; 356400 ; 356401 ;
Abstract
There is disclosed an exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of the first object onto the second object.