The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 1998
Filed:
Jun. 07, 1995
Applicant:
Inventor:
Ivo Raaijmakers, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20419215 ; 20419217 ;
Abstract
A method of removing free titanium from the edge of a substrate having a layer of titanium and a layer of titanium nitride thereover by forming a plasma of a nitrogen-containing gas. The plasma reacts with exposed free titanium to form titanium nitride therefrom. Preferably the dual Ti/TiN depositions and the plasma treatment are all carried out in the same chamber.