The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 1998
Filed:
Jun. 01, 1995
Applicant:
Inventors:
Yu-Chong Tai, Pasadena, CA (US);
Denny K Miu, Valencia, CA (US);
Weilong Tang, Alhambra, CA (US);
Viktoria Temesvary, Culver City, CA (US);
Shuyun Wu, Pasadena, CA (US);
Assignee:
California Institute of Technology, Pasadena, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01H / ;
U.S. Cl.
CPC ...
335 78 ; 361160 ; 257415 ;
Abstract
A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.