The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 1998
Filed:
Mar. 27, 1996
Applicant:
Inventors:
Atsushi Onoe, Tsurugashima, JP;
Kiyofumi Chikuma, Tsurugashima, JP;
Hirofumi Kubota, Tsurugashima, JP;
Assignee:
Pioneer Electronic Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F26B / ;
U.S. Cl.
CPC ...
34586 ; 34408 ;
Abstract
A method for feeding metalorganic gas from solid raw materials in MOCVD and its device provides an absorption reagent consisting of porous grains into which a solid metalorganic material is absorbed and the passing of the carrier gas among the absorptive porous grains in the container under a high thermal condition. The mixture gas including the metalorganic gas at a constant density is obtained in stability for a long time.