The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 1998
Filed:
Dec. 17, 1996
Robert M Boysel, Pleasant Valley, NY (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of manufacturing an optical waveguide device. The method involves removing a portion of an upper cladding layer 110 from above a waveguide 106 and depositing a temporary spacer layer 114 in place of the removed upper cladding 110. A metal membrane 116 is deposited and patterned over the temporary spacer layer 114 and the temporary spacer 114 is removed, leaving the metal membrane 116 suspended over the waveguide 106. When a voltage differential is applied between the metal membrane 116 and electrodes 108 formed on a lower cladding 102, the metal membrane 116 is collapsed against the waveguide 106, attenuating any light transmitted by the waveguide 106.