The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 1998
Filed:
Apr. 25, 1996
Applicant:
Inventors:
Shunji Watanabe, Tokyo, JP;
Takamitsu Fujiu, Zama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01N / ;
U.S. Cl.
CPC ...
73105 ;
Abstract
A probe formed in a flexible portion of a cantilever is protected by a protection frame. This protection frame is separated from a support portion at a border of a groove between the protection frame and the support portion. A piezoelectric crystal layer is formed in the flexible portion, and when the flexible portion is bent by an interatomic force acting between the probe and a sample, a voltage induced between the both ends of the piezoelectric crystal layer changes.
Watanabe, Shunji. (1998). Cantilever and process for fabricating it (U.S. Patent No. 5717132). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5717132
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile