The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 1998
Filed:
Feb. 06, 1996
Katsuya Machino, Chiba-ken, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An azeotropic liquid mixture comprising a first component (isopropyl alcohol) and a second component (water) is charged in the washing tank. A heater and a liquid temperature sensor are used to heat the azeotropic liquid mixture in the washing tank to the azeotropic point of the mixture so as to generate a vapor phase mixture forming a vapor layer. A master mask, which is an article to be cleaned, is exposed to the vapor phase mixture in the vapor layer for washing. The vapor phase mixture used for washing is condensed into a condensate, which is removed out of the washing tank through a condensate pan. The master mask is pulled up out of the vapor layer for water-removing and drying.