The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 1998
Filed:
Jan. 24, 1996
Kazumi Haga, Chofu, JP;
New Creation Co., Ltd., Tokyo-to, JP;
Abstract
There is provided an optical inspection apparatus including an illuminating block for emitting light and illuminating a sample with the emitted light, an observing optical system for forming an image from transmitted light or reflected light from the sample, and an observing block for observing the image. The observing optical system comprises an object side lens arranged on an object side close to the sample, an image side lens arranged on an image side remote from the sample, the object side lens and the image side lens being arranged such that the object side lens and the image side lens have focal points coincident to each other, forming a both-side telecentric optical system for acting on the transmitted light or the reflected light to form the image, an aperture arranged on the focal points or in the vicinity thereof, and a screen arranged on a back focal point of the image side lens or in the vicinity thereof for having the image of the sample being projected thereon. The observing block is arranged such that the image of the sample projected on the screen is observed from a rear side of the screen remote from the sample.