The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 1998
Filed:
Nov. 04, 1994
Takashi Mori, Kawasaki, JP;
Hideki Komatsuda, Kawasaki, JP;
Noriaki Yamamoto, Kitakatsushika-gun, JP;
Nikon Corporation, , JP;
Abstract
An illumination optical apparatus according to the present invention comprises a light source, a collector mirror having an ellipsoidal surface of revolution for reflecting and collecting light from the light source, a collimator lens for converting the light collected by the collector mirror into nearly parallel beams, an optical integrator for producing a plurality of light source images from the beams outgoing from the collimator lens, and a condenser lens for condensing light from the plurality of light source images to illuminate a body to be illuminated in a superimposed manner. Wherein the collimator lens is arranged to satisfy the following condition, R.sub.max <f.sub.col .multidot.sin u.sub.max ; where f.sub.col is a focal length of the condenser lens, u.sub.max a maximum angle of incidence of the light incident into the collimator lens, and R.sub.max a maximum beam radius of the nearly parallel beams collimated by the collimator lens.