The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 1998
Filed:
Sep. 12, 1995
Applicant:
Inventors:
Assignee:
National Research Institute for Metals, Tsukuba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B / ;
U.S. Cl.
CPC ...
423341 ; 423342 ;
Abstract
Highly pure disilicon hexafluoride is synthesized by a process in which a suspension of a fluorination agent is made by dispersing this fluorination agent in an oxybenzene compound as a solvent and disilicon hexachloride is dripped in the suspension to be caused to react with the fluorination agent in nitrogen gas flows under atmospheric pressure, the oxybenzene being expressed by a following formula: ##STR1## (where each of R.sub.1 and R.sub.2 is an alkyl group alternatively having one or more substituents; carbon numbers summed up by R.sub.1 and R.sub.2 are equal to at least 2; and m.gtoreq.1 and n.gtoreq.0).