The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 1998
Filed:
Aug. 07, 1996
Applicant:
Inventor:
Yuzo Mori, Katano-shi, Osaka 576, JP;
Assignees:
Sanyo Electric Co., Ltd., Moriguchi, JP;
Other;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
1187 / ; 118728 ; 427573 ; 427569 ;
Abstract
In a method of and an apparatus for forming a thin film on a substrate, a rotary electrode is provided and rotated so that an electrode surface of the electrode moves and passes by a substrate surface due to the rotation of the electrode. Thereby a reaction gas is supplied into a gap between the substrate surface and the electrode surface. A high-frequency power is applied or dc power to the rotary electrode thereby generating a plasma between the substrate surface and the electrode surface, for forming the thin film by chemical reaction of the reaction gas supplied into the plasma.