The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 1998
Filed:
Sep. 16, 1996
Shigeo Akanuma, Ayase, JP;
Yoshinobu Terui, Ayase, JP;
Speedfam Clean System Co., Ltd., Ayase, JP;
Abstract
Liquid feed section 2 and liquid discharge section 4 of a washing vessel 1 are formed in widths W2 and W4 which are broader than an intermediate washing section 3 with a width W3, and at the same time formed in a greater depth to have bottom surfaces sunken or stepped down from the bottom surface of the washing section 3. Regulator plate holder frames 14 and 20 of upstream and downstream flow regulator means 7 and 8 are located in position by abutting engagement with stepped portions 15 and 21 in such a way that only perforated portions of regulator plates 11, 12, 18 and 19 are disposed in the flow passage to and from the intermediate washing section, precluding flow disturbances which would otherwise be caused by the holder frame or unperforated peripheral portions of the regulator plates.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile