The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 1998
Filed:
Aug. 12, 1996
Teruaki Nagahara, Itami, JP;
Masahiro Yamamoto, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A semiconductor acceleration sensor for detecting accelerations applied in two orthogonal directions includes a semiconductor body having a peripheral frame, a central weight disposed within the peripheral frame, and first and second beams extending from and connecting the peripheral frame and the weight. At least four piezoresistors are disposed on each of the first and second beams and are electrically connected in first and second bridge circuits. Each bridge circuit includes two piezoresistors from each of the two beams so that accelerations applied perpendicular and parallel to the semiconductor body can be individually detected with a single semiconductor acceleration sensor.