The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 1998
Filed:
Nov. 29, 1995
Applicant:
Inventors:
Aaron Lewis, Ithaca, NY (US);
Klony Lieberman, Kew Gardens, NY (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310328 ; 310331 ; 310369 ;
Abstract
A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.