The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 1998
Filed:
Mar. 27, 1996
Applicant:
Inventor:
George Knoedl, Jr, Milford, NJ (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03H / ;
U.S. Cl.
CPC ...
430-2 ; 430-1 ; 430-5 ; 430320 ; 359 15 ;
Abstract
A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A holograph is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The holograph includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.
Knoedl, Jr, George. (1998). Holographic method for generating three dimensional conformal photo (U.S. Patent No. 5705298). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5705298
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile