The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 1998
Filed:
Mar. 27, 1996
Nisshin Steel Co., Ltd., Tokyo, JP;
Abstract
A Mg source 3 is received in a vessel 1 having an opening 8, and the vessel 1 is heated at 670.degree. C. or higher to effuse Mg vapor through the opening 8. Since the vessel 1 is filled with Mg vapor, Mg is evaporated from molten state under stable condition without fluctuations in evaporation speed. The Mg vapor is effectively consumed for vapor deposition. A reflector plate may be provided at the outlet of the opening 8, or a duct for introducing Mg vapor from the vessel to the surface of a substrate sheet may be provided. In order to evaporate Mg from stabilized molten state, operational conditions are preferably determined so as to satisfy the relationships of W.sub.1 /W.sub.2 <0.6.times.(P.sub.Mg /V.sup.3) and W.sub.1 /W.sub.2 <0.04.times.P.sub.Mg, wherein W.sub.1 represents the area (mm.sup.2) of the opening 8, W.sub.2 represents the evaporation surface area (mm.sup.2) of the Mg source 3, P.sub.Mg represents Mg vapor pressure (torr.) and V represents the degree of vacuum.