The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 1998
Filed:
Feb. 22, 1996
Applicant:
Inventor:
Yasuhiko Matsumoto, Hamamatsu, JP;
Assignee:
Yamaha Corporation, Hamamatsu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
1566361 ; 437195 ; 437228 ; 437231 ;
Abstract
A wiring layer formed on a field insulating film covering the surface of a semiconductor substrate is covered with an interlayer film. The interlayer film is covered with a flat film such as spin-on-glass formed by spin coating. The flat film has, for example, a laminated structure of an organic SOG film and an inorganic SOG film. The inorganic SOG film is suitable for obtaining a polishing speed generally equal to that of a CVD oxide film. The insulating film and the flat film are chemical-mechanical polished at a same polishing speed until the flat film is thoroughly removed, to leave a planarized insulating film.