The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 1997
Filed:
Jun. 27, 1996
Satoshi Arima, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A semiconductor device is obtained which can suppress decrease in contact area between an interconnection layer and a semiconductor substrate. Further, a method of manufacturing a semiconductor device which can increase in contact resistance between first and second interconnection layers can be obtained. In the semiconductor device, upper surface of an element isolating insulating film is removed near a boundary point between the element isolating oxide film and the semiconductor substrate. Consequently, the surface of the semiconductor substrate is exposed where the element isolating insulating film has been removed. Since a conductive layer is formed to be in contact with the exposed semiconductor substrate, contact area between the conductive layer and the semiconductor substrate is increased. In the manufacturing method of the semiconductor device, foreign matters on the first interconnection layer derived from wet etching using hydrofluoric acid solution is removed by anisotropic dry etching, and thereafter a second interconnection layer is formed on the first interconnection layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile