The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 1997
Filed:
Apr. 29, 1996
Jeong-Beom Ji, Seoul, KR;
Yong-Ki Min, Seoul, KR;
Daewoo Electronics Co., Ltd., Seoul, KR;
Abstract
An array of thin film actuated mirrors includes an active matrix and an array of actuating structures, each of the actuating structures including an elastic member, a pair of conduits, a second thin film electrode with a stripe, a thin film electrodisplacive member and a first thin film electrode. Furthermore, a method for the manufacture of the array of thin film actuated mirrors includes the steps of: providing an active matrix; depositing a thin film sacrificial layer; creating an array of pairs of empty slots in the thin film sacrificial layer; depositing an elastic layer; forming an array of conduits in the elastic layer; depositing a second thin film layer; creating stripes on the second thin film layer; depositing a thin film electrodisplacive and a first thin film layers; patterning the first thin film, the thin film electrodisplacive, the second thin film and the elastic layers, thereby forming an array of actuated mirror structures; forming a thin film protection layer; removing the thin film sacrificial layer; and removing the thin film protection layer, thereby forming the array of thin film actuated mirrors.