The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 1997
Filed:
Jun. 24, 1996
Applicant:
Inventor:
Mitsuma Ooishi, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438592 ; 438305 ;
Abstract
A field effect transistor has a polycide structure having a doped polysilicon strip on a gate oxide layer and a crystal tungsten silicide strip on the doped polysilicon strip, and the polycide structure is formed through a process sequence having the steps of patterning an amorphous tungsten silicide layer into an amorphous tungsten silicide strip, crystallizing the amorphous tungsten silicide strip and patterning a doped polysilicon layer into the doped polysilicon strip, thereby preventing the crystal tungsten silicide strip from undesirable warp without contamination of the gate oxide layer.