The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 1997
Filed:
Aug. 14, 1995
Applicant:
Inventors:
Assignee:
Nippon Oil Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01B / ; H01B / ; C23C / ; C23C / ;
U.S. Cl.
CPC ...
252513 ; 252514 ; 252512 ; 252518 ; 252519 ; 252520 ; 252516 ; 252521 ; 427249 ; 427255 ; 528 15 ; 528 16 ; 528 17 ; 528 14 ; 528 18 ; 528 19 ;
Abstract
A method for producing a semiconducting material by subjecting a hydrosilane monomer to dehydrogenative condensation followed by thermal decomposition is disclosed. The hydrosilane monomer may be a hydromonosilane, a hydrodisilane or a hydrotrisilane. The dehydrogenative condensation is conducted in the presence of a catalyst that contains at least one metal or metal compound of Groups 3B, 4B and 8 of the Periodic Table. The catalyst may be used in conjunction with a silane compound or a metal hydride. The semiconducting material that is formed may have a silicon content of 70 atomic % or more.