The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 1997

Filed:

Jan. 22, 1996
Applicant:
Inventors:

Martin Bruck, Weilrod, DE;

Tilo Vaahs, Eppstein, DE;

Wolfgang Bocker, Eppstein, DE;

Wolfgang Ehrfeld, Mainz, DE;

Manfred Lacher, Mainz, DE;

Ludwig Giebel, Mainz, DE;

Assignees:

Hoechst Aktiengesellschaft, Frankfurt am Main, DE;

Institut Fuer Mikrotechnik GmbH, Mainz, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B / ;
U.S. Cl.
CPC ...
501 87 ; 501 88 ; 501 96 ; 501 97 ; 501127 ; 264 60 ; 264401 ; 264430 ; 264434 ;
Abstract

A process for producing a ceramic having a microstructured surface with a surface profile depth of less than 1 micron, measured by the atomic force microscopy, comprising preparing a polymeric precursor material, shaping the precursor material into a structured mold insert of an inherently stable mold insert material having a structured surface geometry corresponding with the microstructured surface of the ceramic to form a shaped precursor material, the shaped precursor material being rendered infusible by chemical crosslinking, and wherein the inherently stable mold insert material is selected from materials having sufficient strength for structuring and high molding accuracy, and pyrolyzing the shaped precursor material, whereby the ceramic having the microstructured surface is obtained.


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