The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 1997
Filed:
Mar. 24, 1994
Nobuo Fujie, Kawasaki, JP;
Hitoshi Obara, Kawasaki, JP;
Keiji Kuroiwa, Kawasaki, JP;
Masaki Nakamura, Kawasaki, JP;
Kazuya Watanabe, Kawasaki, JP;
Takashi Aruga, Kawasaki, JP;
Nobutaka Horii, Kawasaki, JP;
Motokazu Suzuki, Kawasaki, JP;
Tadahiro Hayashi, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
In an ultraviolet exposure apparatus, substances contained in an atmosphere contacting a lens surface are reduced, the substances generating accumulations on the lens surface. Openings are formed in the wall of a lens barrel to allow the atmosphere to be replaced by a proper gas. The proper atmospheric gas may be a gas not containing oxygen such as a nitrogen gas, or clean air obtained by intentionally generating accumulations by applying ultraviolet light to source air. A ultraviolet light source is preferably cooled by a cooling system different from the cooling system of a lens optical system.