The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 1997
Filed:
Jun. 12, 1996
Hendrik F Bok, Fairhaven, MA (US);
Philip J Birbara, Windsor Locks, CT (US);
Other;
Abstract
Method and apparatus for applying thin films of coating material with a high degree of uniformity, high utilization of coating fluid and superior adhesion characteristics are disclosed. According to the method, an inverted substrate is moved horizontally and countercurrent to a two stage coating fluid applicator assembly. The first coating stage utilizes megasonic pressure waves directed inclinedly upwardly through the coating fluid/substrate surface interface to wet, clean, degas and deposit coating fluid on the substrate surface. A second stage removes excess coating fluid at the substrate's trailing edge so as to precisely establish a thin and uniform coating film. After the coating has been applied, spinning of the substrate may be employed to enable further coating film uniformity and to increase the film's drying rate.