The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 1997
Filed:
Nov. 27, 1995
Bernd Hillerich, Ulm, DE;
Manfred Jagiella, Gaggenau, DE;
Precitec GmbH, Rotenfels, DE;
Abstract
A method and apparatus for monitoring thermal processing of a workpiece using a sensor electrode which can be positioned relative to the workpiece and to which an alternating electric signal is applied in order to determine a measured capacitance (C.sub.meas) present between the sensor electrode and workpiece by evaluating a change in the alternating signal as a consequence of the measured capacitance (C.sub.meas). A measured capacitance frequency distribution is formed from a number of determined measured capacitances (C.sub.meas). The measured distribution is compared with a reference distribution. If a deviation is present between the two distributions, process parameters can be appropriately readjusted. It is preferable to use a laser beam for processing the workpiece.