The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 1997

Filed:

Dec. 04, 1995
Applicant:
Inventors:

Takamitsu Fujiu, Zama, JP;

Shunji Watanabe, Setagaya-ku, JP;

Tatsushi Nomura, Machida, JP;

Yoshinori Sango, Machida, JP;

Toru Fujii, Yamato, JP;

Tetsuo Hattori, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
73105 ;
Abstract

Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force microscope, respectively. In the atomic force microscope, an atomic force microscope probe, whose size has been reduced since a device for detecting interatomic force is provided by a piezoelectric film, piezoresistance, or the like, is disposed between an objective lens of the optical microscope and a sample to be observed or at a position of the objective lens when the objective lens and the probe are constructed so as to be interchangeable, thereby enabling the optical microscope to confirm a scanning position of the atomic force microscope.


Find Patent Forward Citations

Loading…