The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 1997

Filed:

Sep. 11, 1996
Applicant:
Inventor:

Yoshiaki Kojima, Saitama-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16J / ;
U.S. Cl.
CPC ...
346137 ; 277-3 ; 277 15 ; 277 80 ;
Abstract

There is provided an information recording apparatus having a vacuum system. The apparatus includes a vacuum chamber connected with a first evacuator device. An electronic beam producing device is partially enclosed in the vacuum chamber for emitting an electronic beam for recording information on a recording medium. A moving stage is provided in the vacuum chamber for linearly moving the recording medium in a vacuum atmosphere within the vacuum chamber. A spindle is disposed in the vacuum chamber for rotating the recording medium. The spindle is supported on an air bearing and is rotatably driven by a spindle motor. A magnetic fluid seal producing device is provided around the spindle close to the vacuum chamber side. A pressure differential chamber is provided around the spindle close to the air bearing side. The pressure differential chamber is connected with a second evacuator device.


Find Patent Forward Citations

Loading…