The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 1997
Filed:
May. 09, 1996
Shinya Hara, Tokyo, JP;
Mitsuhiro Okazaki, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A dynamic amount detector generates correction information according to a predetermined relational expression, based on directions and magnitudes of dynamic amounts which are opposite to each other and imparted to one of directions of a plurality of detection axes, directions and magnitudes of dynamic amounts imparted to respective directions of the remaining detection axes, and detection values in a dynamic amount detecting means obtained when these dynamic amounts are respectively imparted. By means of this correction information, the output value detected by the dynamic amount detecting means is corrected. While a high detection accuracy is attained, the correction information concerning detection accuracy can be determined simply.