The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 1997
Filed:
Jul. 19, 1995
James F O'Neill, Penfield, NY (US);
Xerox Corporation, Stamford, CT (US);
Abstract
A plurality of a thermal ink jet printheads are fabricated from a heater wafer, on which a plurality of arrays of heaters, transducers and addressing logic are located on one surface thereof, by depositing multiple coatings of a positive photoresist over the heater wafer to achieve a desired thickness and then exposing to the photoresist UV (ultra violet) light through a graded mask. The mask controls the depth of developed resist and concurrently forms a variable depth profile for the ink channel structures containing ink flow channels, reservoirs, and heater pits in a single step. A flat glass substrate with ink inlets formed therein is mated to the patterned photoresist to complete the wafer/substrate pair containing the plurality of printheads. The individual printheads are obtained by a subsequent dicing operation. In an alternate embodiment, a negative acting positive photoresist is used.