The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 1997
Filed:
Aug. 04, 1995
Applicant:
Inventor:
Helmut Baumann, Gomaringen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437250 ; 437225 ; 437974 ; 148D / ;
Abstract
An anodic bonding method allows uniform pressure on the components to be bonded. This is achieved in that the components which are bonded are structured such that cavities are formed between the components. The cavities are evacuated and the components are thus pressed together during bonding.