The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 1997
Filed:
Mar. 24, 1994
G Benjamin Hocker, Minnetonka, MN (US);
David W Burns, Minneapolis, MN (US);
Akintunde I Akinwande, Bloomington, MN (US);
Robert D Horning, Burnsville, MN (US);
Amir R Mirza, Golden Valley, MN (US);
Thomas G Stratton, Roseville, MN (US);
Deidrich J Saathoff, Burnsville, MN (US);
James K Carney, Eden Prairie, MN (US);
Scott A McPherson, Eagan, MN (US);
Honeywell, Inc., Minneapolis, MN (US);
Abstract
This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.