The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 1997

Filed:

May. 04, 1994
Applicant:
Inventor:

Yong-Bae Jeon, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; H04R / ; H01L / ;
U.S. Cl.
CPC ...
359224 ; 359291 ; 359295 ; 359855 ; 310328 ; 310366 ;
Abstract

An M.times.N actuated mirror array for use in an optical projection system, wherein M and N are integers, including: an array of M.times.N electrodisplacive actuators wherein each of the M.times.N electrodisplacive actuators is provided with a top surface, a bottom surface, a pair of external sides and has a bimorph structure having a pair of layers of an electrodisplacive material, a common signal electrode located between the pair of layers of the electrodisplacive material, and a pair of reference electrodes provided on the external sides thereof an array of M.times.N mirrors wherein each of M.times.N mirrors is coupled with each of the M.times.N electrodisplacive actuators and is mounted on the top surface of each of the M.times.N actuators an active matrix substrate comprising a substrate and an array of M.times.N second conductive type MOSFETs formed on the substrate; and an array of M.times.N connecting terminals wherein each of the M.times.N connecting terminals, located between each of the actuators and the substrate, is used for electrically connecting the common signal electrode of each of the actuators with each of the MOSFETs.


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