The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 1997
Filed:
Jun. 19, 1996
Applicant:
Inventor:
Sameer I Madanshetty, Cambridge, MA (US);
Assignee:
Trustees of Boston University, Boston, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134-13 ; 134184 ; 134902 ;
Abstract
The invention relates to the surgical cleaning of a semiconductor wafer through the inducement of cavitation on the surface of the wafer at the location of an adherent particle. Cavitation is induced by focusing two acoustic fields on the surface of the wafer. The two acoustic fields include a cavitation field having relatively low frequency focused on the wafer surface from a direction perpendicular to the wafer and a coaxing field of relatively high frequency focused on the wafer surface form a direction between 0 and 25 degrees from the wafer surface.