The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 1997
Filed:
Mar. 22, 1996
Joseph A Lamb, Jr, Tucson, AZ (US);
James V Semrad, Tucson, AZ (US);
Wyko Corporation, Tucson, AZ (US);
Abstract
A scanning phase-shifting mechanism comprising reference optics supported by three independent supporting members disposed in fixed triangular relation in a plane substantially normal to the optical axis of the instrument. Two upper members support all of the weight of the optics and provide a preferably horizontal, first axis of rotation for adjustment of the tip of the optics in relation to the optical axis of the instrument. The lower member does not support any of the weight of the optics, providing instead only longitudinal support to cause motion during translation. In addition, in conjunction with at least one of the upper members, the lower member provides a second axis of rotation, preferably orthogonal to the first axis, for adjustment of the tilt of the optics. Each supporting member is rigidly connected to a first end of a cantilevered flexure which is anchored at the other end to a stationary support structure housing the micromotion-translation mechanism of the phase-shifting interferometer. A piezoelectric element couples the support structure with the first end of each flexure.