The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 1997
Filed:
Feb. 12, 1996
Applicant:
Inventor:
Tapani Ryhanen, Helsinki, FI;
Assignee:
Vaisala OY, Helsinki, FI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73718 ; 73724 ; 3612833 ; 3612834 ;
Abstract
The invention is related to a symmetrical capacitive differential pressure sensor formed by depositing onto a substrate (1) using the surface-micromachining methods of semiconductor device manufacturing technology. The sensor comprises the following, entirely from each other electrically insulated thin-film layers: an at least partially conducting sensing diaphragm (5) made from polysilicon and conducting counterelectrodes (3 and 7) adapted to both sides of the sensing diaphragm (5). According to the invention, said counter-electrodes (3 and 7) are made from polysilicon thin film and comprise at least one electrically conducting area.