The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 1997

Filed:

Feb. 22, 1996
Applicant:
Inventor:

Kil Ho Lee, Ichonkun, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 41 ; 20200 ; 20950 ; 20 46 ;
Abstract

In accordance with an aspect of the present invention, there is provided a method for forming a junction of a low sheet resistance on a silicon substrate, comprising the steps of forming an amorphous silicon layer on said silicon substrate; implanting impurity ions into said amorphous silicon layer; implanting transition metal ions into said amorphous silicon layer; and thermally treating said amorphous silicon layer and silicon substrate such that said transition metal ions diffuse to the surface of said silicon substrate and said impurity ions diffuse into said silicon substrate.


Find Patent Forward Citations

Lee, Kil. (1997). Method for forming a semiconductor device having a shallow junction and (U.S. Patent No. 5677213). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5677213

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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