The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 1997
Filed:
Jul. 29, 1996
Applicant:
Inventors:
Fumiyoshi Urano, Kawagoe, JP;
Keiji Oono, Kawagoe, JP;
Hiroshi Matsuda, Kawagoe, JP;
Masayuki Endo, Izumi, JP;
Satoshi Kobayashi, Kadoma, JP;
Assignees:
Wako Pure Chemical Industries, Ltd., Osaka, JP;
Matsushita Electric Industries Co., Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430325 ; 4302701 ; 4302801 ; 430330 ;
Abstract
A deep ultraviolet absorbent comprising at least one compound having one or more glycidyl groups in the molecule and at least one anthracene derivative, and a solvent capable of dissolving these compounds is effective for preventing reflection of deep ultraviolet light from a substrate during formation of resist pattern, resulting in forming ultra-fine patterns without causing notching and halation.