The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 1997
Filed:
May. 27, 1994
Applicant:
Inventors:
Hajime Hashimoto, Kyoto, JP;
Kazuo Kubota, Kyoto, JP;
Daisuke Inoue, Kyoto, JP;
Syuichi Nogawa, Kyoto, JP;
Assignee:
Nissin Electric Co., Ltd., Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; B65G / ;
U.S. Cl.
CPC ...
20429825 ; 20429815 ; 414217 ; 414222 ; 118719 ; 118728 ;
Abstract
A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber through gate valves respectively, a plurality of pivots provided in the film forming chamber correspondingly to the respective load lock chambers, and carrying arms supported by the pivots respectively so as to move the substrate from any one of the load lock chambers to the film forming position and contrariwise from the film forming position to any one of the load lock chambers.