The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 1997
Filed:
Dec. 11, 1996
Applicant:
Inventors:
John A Rogers, Castle Rock, CO (US);
Keith A Nelson, Newton, MA (US);
Lisa Dhar, Northbrook, IL (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
73597 ; 73643 ; 3564 / ;
Abstract
Anisotropic mechanical properties of thin films are measured by exciting time-dependent waveguide acoustic modes in the thin film sample with a pair of excitation pulses from an excitation laser. The waveguide acoustic modes are then optically detected by diffracting a probe laser beam off the excited modes. The probe beam is detected to generate an electronic signal. The anisotropic moduli and related properties in the film are determined by analyzing the electronic signal using a mathematical inversion procedure.