The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 1997
Filed:
Dec. 12, 1995
Applicant:
Inventor:
Isao Suzuki, Tokyo, JP;
Assignee:
MKS Japan, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
73202 ; 138 42 ;
Abstract
A laminar flow device includes a plurality of disks and a plurality of spacers alternately stacked together. The plurality of disks are defined by first disks and second disks, each of the first disks having a hole formed through a central portion thereof, and each of the second disks having a plurality of holes formed through an outer peripheral portion thereof. The first disks and the second disks are alternately arranged with the spacer interposed between any two adjacent ones of the disks.